@Article{BarbosaMenBalTraCor:2016:EfArDu,
author = "Barbosa, Divani Ribeiro and Mengui, {\'U}rsula Andr{\'e}ia and
Baldan, Maur{\'{\i}}cio Ribeiro and Trava Airoldi, Vladimir
Jesus and Corat, Evaldo Jos{\'e}",
affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)} and {Instituto
Nacional de Pesquisas Espaciais (INPE)} and {Instituto Nacional de
Pesquisas Espaciais (INPE)} and {Instituto Nacional de Pesquisas
Espaciais (INPE)} and {Instituto Nacional de Pesquisas Espaciais
(INPE)}",
title = "Effect of argon during diamond deposition by hot filament chemical
vapor deposition",
journal = "Materials Science Forum",
year = "2016",
volume = "869",
pages = "721--726",
note = "Brazilian Conference on Materials Science and Engineering, 21.
(CBECIMAT), Cuiab{\'a} MT, 9-13 Nov. 2014.",
keywords = "Argon, Diamond, Growth rate, HFCVD.",
abstract = "The effect of argon content upon the growth rate and the
properties of diamond thin films grown with different grains sizes
are explored. An argon-free and argon-rich gas mixture of methane
and hydrogen is used in a hot filament chemical vapor deposition
reactor. Characterization of the films is accomplished by scanning
electron microscopy, Raman spectroscopy and high resolution x-ray
diffraction. An extensive comparison of the growth rate values and
films morphologies obtained in this study with those found in the
literature suggests that there are distinct common trends for
microcrystalline and nanocrystalline diamond growth, despite a
large variation in the gas mixture composition. Included is a
discussion of the possible reasons for these observations.",
doi = "10.4028/www.scientific.net/MSF.869.721",
url = "http://dx.doi.org/10.4028/www.scientific.net/MSF.869.721",
issn = "0255-5476",
language = "en",
urlaccessdate = "04 maio 2024"
}